Overview

INSTEMS-MET is an in situ TEM system capable of applying mechanical straining, thermal heating, and electrical biasing within the transmission electron microscope. The system employs a MEMS-based design and an integrated multi-field coupling architecture to address compatibility challenges associated with combined stimuli, while fully maintaining the double-tilt functionality of the TEM holder.

The platform enables precise control of thermal, mechanical, and electrical loading during TEM observation, extending in situ electron microscopy for studies under complex, coupled-field conditions.

Highlights

Specifications

Mini-lab compatibility	MT / TE / ME / M / E / T
Temperature range	Room temperature to 1200 °C *
Temperature accuracy	≥ 98%
Heating rate	> 10,000 °C/s
Maximum force	> 100 mN
Maximum displacement	4 µm
Actuation accuracy	< 500 pm
Maximum voltage	± 50 V *
Current measurement range	1 pA – 1 A
Spatial resolution	≤ 0.1 nm
EDS compatibility	Yes

* Specifications depend on the TEM and the selected mini-lab / microscope configuration.

Applications

• Semiconductor materials and devices
• Li-ion battery
• Device failure analysis
• Thermoelectric materials
• High-temperature deformation
• Creep deformation
• Piezoelectric materials
• Sensors
• Nanodevices
• Dielectrics

System Components

• Double-tilt holder
• Mini-labs
• Mini-lab transfer box
• Tool kit
• PC & software
• Control unit